Comparison of magnetron sputtering and gas aggregation nanoparticle source used for fabrication of silver nanoparticle films

Surface and Coatings Technology

Volumn 275, Issue , 2015, Pages 296-302

  Kratochvíl, Jiří ^a   Kuzminova, Anna ^a   Kylián, Ondřej ^a   Biederman, Hynek ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Gas aggregation sources; Magnetron sputtering; Nanoparticles

Indexed keywords

FILM PREPARATION; MAGNETRON SPUTTERING; METAL NANOPARTICLES; METALLIC FILMS; NANOPARTICLES; OPTICAL FILMS; OPTICAL PROPERTIES; SUBSTRATES; TOPOGRAPHY;

AG NANOPARTICLE; ANOMALOUS ABSORPTION; DEPOSITION TIME; GAS AGGREGATION; METALLIC NANOPARTICLES; ROOT MEAN SQUARE ROUGHNESS; SUBSTRATE MATERIAL;

SILVER NANOPARTICLES;

EID: 84930866652     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2015.05.003     Document Type: Article

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