CMOS compatible on-chip decoupling capacitor based on vertically aligned carbon nanofibers

Solid-State Electronics

Volumn 107, Issue , 2015, Pages 15-19

  Saleem, A M ^a,b   Goransson G ^c   Desmaris, V ^a   Enoksson, P ^b  

^a SMOLTEK AB   (Sweden)

^b CHALMERS UNIVERSITY OF TECHNOLOGY   (Sweden)

^c UNIVERSITY OF GOTHENBURG   (Sweden)

Author keywords

Carbon nanofibers; CMOS; Decoupling capacitor; Low temperature

Indexed keywords

CAPACITANCE; CAPACITORS; CMOS INTEGRATED CIRCUITS; CYCLIC VOLTAMMETRY; ELECTROCHEMICAL ELECTRODES; ELECTRODES; NANOFIBERS; PLASMA CVD; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TEMPERATURE;

DECOUPLING CAPACITOR; DIRECT CURRENT PLASMAS; ELECTRODE MATERIAL; HIGH SPECIFIC CAPACITANCES; LOW TEMPERATURES; ON-CHIP DECOUPLING CAPACITORS; SPECIFIC CAPACITANCE; VERTICALLY ALIGNED CARBON NANOFIBERS;

CARBON NANOFIBERS;

EID: 84930627471     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2015.01.022     Document Type: Article

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