A "thru-short-open" de-embedding method for accurate on-wafer RF measurements of nano-scale MOSFETs

Journal of Semiconductor Technology and Science

Volumn 12, Issue 1, 2012, Pages 53-58

  Kim, Ju Young ^a   Choi, Min Kwon ^a   Lee, Seonghearn ^a  

^a Hankuk University of Foreign Studies   (South Korea)

Author keywords

Coupling capacitance; De embedding; MOSFET; Nano scale CMOS; On wafer measurement; RF; S parameter measurement

Indexed keywords

CAPACITANCE; CUTOFF FREQUENCY; NANOTECHNOLOGY; SCATTERING PARAMETERS;

COUPLING CAPACITANCE; DE-EMBEDDING; MOS-FET; NANO SCALE; ON-WAFER MEASUREMENTS; RF; S-PARAMETER MEASUREMENTS;

MOSFET DEVICES;

EID: 84930485595     PISSN: 15981657     EISSN: None     Source Type: Journal    
DOI: 10.5573/JSTS.2012.12.1.53     Document Type: Article

References (10)

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