A low-power gas sensor for environmental monitoring using a capacitive micromachined ultrasonic transducer

Proceedings of IEEE Sensors

Volumn 2014-December, Issue December, 2014, Pages 677-680

  Mahmud, M M ^a   Li, J ^a   Lunsford, J E ^a   Zhang, X ^a   Yamaner, F Y ^a   Nagle, H T ^a   Oralkan, O ^a  

^a North Carolina State University   (United States)

Author keywords

Anoding bonding; Capacitive micromachined ultrasonic transducer; Environmental monitoring; Low power; Massloading

Indexed keywords

BOROSILICATE GLASS; CAPACITIVE SENSORS; CHEMICAL BONDS; CHEMICAL DETECTION; CHEMICAL SENSORS; CHEMICAL WARFARE; GAS DETECTORS; PLATES (STRUCTURAL COMPONENTS); Q FACTOR MEASUREMENT; RESONATORS; SILICON WAFERS; TRANSDUCERS; ULTRASONIC APPLICATIONS; WAFER BONDING; WEARABLE SENSORS;

ANODING BONDING; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; ENVIRONMENTAL MONITORING; LOW POWER; MASSLOADING;

ULTRASONIC TRANSDUCERS;

EID: 84930232761     PISSN: 19300395     EISSN: 21689229     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2014.6985089     Document Type: Conference Paper

References (4)

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