Formation of cubic boron nitride films by arc-like plasma-enhanced ion plating method

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 4, 1990, Pages 3168-3174

  Hirai, Yo ^b  

^a KOBE STEEL LTD   (Japan)

^b KOBELCO RESEARCH INSTITUTE INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS MATERIALS; BORON NITRIDE; COBALT; DEPOSITION RATES; ELECTRON DIFFRACTION; FILM GROWTH; ION BOMBARDMENT; ION IMPLANTATION; NITRIDES; SILICON; SPECTROSCOPY; STAINLESS STEEL; SUBSTRATES; TUNGSTEN ALLOYS; TUNGSTEN CARBIDE;

AMORPHOUS BORON NITRIDE; BN; CUBIC BORON NITRIDE (CBN); CUBIC BORON NITRIDE FILMS; CUBIC LATTICE; INFRARED SPECTRUM; ION PLATING; ION PLATING PROCESS;

CUBIC BORON NITRIDE;

EID: 84930193654     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576602     Document Type: Article

References (14)

1. R. H. Wentorf, Jr., J. Chem. Phys. 36, 1990 (1962).
2. M. Sokolowski, J. Cryst. Growth 46, 136 (1979).
3. C. Weissmantel, J. Vac. Sci. Technol. 18, 179 (1981).
4. M. Satou and F. Fujimoto, Jpn. J. Appl. Phys. 22, L171 (1983).
5. K. Inagawa, K. Watanabe, I. Tanaka, K. Saitoh, and A. Itoh, Proceedings of the Ninth Symposium on Ion Sources and Ion-Assisted Technology, Tokyo, 1985 (unpublished), p. 299.
6. T. Mouri, O. lijima, and Y. Narnba, J. Vac. Soc. Jpn. 29, 164 (1986).
7. S. Komatsu, T. Yoshida, and K. Akashi, Proceedings of the Ninth Symposium on ISIAT, Tokyo, 1985 (unpublished), p. 421.
8. Y. Ichinose, H. Saitoh, and T. Ishiguro, Proceedings of the 11th Symposium on ISIAT, Tokyo, 1987 (unpublished), p. 469.
9. Y. Chatanihara, A. Masuda, H. Yokoyama, K. Imura, Y. Osaka, and M. Ichihara, Proceedings of the Spring Meeting of the Japanese Applied Physics Society, 1987 (unpublished), p. 365.
10. P. J. Gielisse, S. S. Mitra, J. N. Plendl, R. D. Griffis, L. G. Mansur, R. Marshall, and E. A. Pascoe, Phys. Rev. 155, 1039 (1967).
11. H. K. Pulker, Proceedings of the Eighth International Conference on Vacuum Metallurgy, Linz, 1985 (unpublished), p. 115.
12. C. Weissmantel, K. Bewilogua, K. Breuer, D. Dietrich, U. Ebersbach, H. -J. Erler, B. Rau, and G. Reisse, Thin Solid Films 96, 31 (1982).
13. C. Weissmarttei, Thin Solid Films 92, 55 (1982).
14. D. R. Clarke and F. Adar, Mater. Sci. Res. 15, 199 (1983).