Chemical solution deposition of functional oxide thin films

Chemical Solution Deposition of Functional Oxide Thin Films

Volumn 9783211993118, Issue , 2013, Pages 1-796

  Schneller, Theodor ^a   Waser, Rainer ^a   Kosec, Marija ^b   Payne, David ^c  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b JO EF STEFAN INSTITUTE   (Slovenia)

^c UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANTIREFLECTION COATINGS; CHEMICALS; DECOMPOSITION; DEPOSITION; MEMS; OPTICAL COATINGS; RANDOM ACCESS STORAGE; SEMICONDUCTING LEAD COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLID OXIDE FUEL CELLS (SOFC); THIN FILMS; TITANIUM OXIDES;

ANTI REFLECTIVE COATINGS; CHEMICAL SOLUTION DEPOSITION; FERROELECTRIC RANDOM ACCESS MEMORY; LEAD ZIRCONATE TITANATE; METALLO-ORGANIC DECOMPOSITIONS; MICRO ELECTRO MECHANICAL SYSTEM; THIN FILM SOLID OXIDE FUEL CELLS; THIN-FILM DEPOSITION TECHNIQUE;

OXIDE FILMS;

EID: 84930064066     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-211-99311-8     Document Type: Book

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