A novel algorithm for wafer sojourn time analysis of single-arm cluster tools with wafer residency time constraints and activity time variation

IEEE Transactions on Systems, Man, and Cybernetics: Systems

Volumn 45, Issue 5, 2015, Pages 805-818

  Pan, Chunrong ^a   Qiao, Yan ^b   Wu, Naiqi ^b,c   Zhou, Mengchu ^c,d  

^a JIANGXI UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b GUANGDONG UNIVERSITY OF TECHNOLOGY   (China)

^c MACAU UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Macao)

^d NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cluster tools; discrete event system; manufacturing; Petri net (PN); scheduling

Indexed keywords

DISCRETE EVENT SIMULATION; MANUFACTURE; PETRI NETS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

ACTIVITY TIME; CLUSTER TOOL; NOVEL ALGORITHM; PETRI NET MODELS; POLYNOMIAL ALGORITHM; SCHEDULING PROBLEM; SEMICONDUCTOR MANUFACTURING; TIME CONSTRAINTS;

SILICON WAFERS;

EID: 84928482037     PISSN: 21682216     EISSN: 21682232     Source Type: Journal    
DOI: 10.1109/TSMC.2014.2368995     Document Type: Article

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