Measurement and analysis of radio frequency glow discharge electrical impedance and network power loss

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 8, Issue 2, 1990, Pages 916-923

  Butterbaugh, J W ^a   Baston, L D ^a   Sawin, H H ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84927484447     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.576896     Document Type: Article

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