An efficient BTX sensor based on p-type nanoporous titania thin films

Microelectronics Reliability

Volumn 55, Issue 3-4, 2015, Pages 558-564

  Dutta, K ^a   Bhowmik, B ^a   Hazra, A ^a   Chattopadhyay, P P ^a   Bhattacharyya, P ^a  

^a INDIAN INSTITUTE OF ENGINEERING SCIENCE AND TECHNOLOGY   (India)

Author keywords

Benzene; Fast response; Low operating temperature; p TiO2; Toluene; Xylene

Indexed keywords

BENZENE; CHEMICAL SENSORS; OXIDE MINERALS; SCANNING ELECTRON MICROSCOPY; SILICON OXIDES; SILICON WAFERS; SOL-GELS; TEMPERATURE; TOLUENE; X RAY DIFFRACTION ANALYSIS; XYLENE;

FAST RESPONSE; FIELD EMISSION SCANNING ELECTRON MICROSCOPES; LOW OPERATING TEMPERATURE; OPERATING TEMPERATURE; OXIDIZED SILICON WAFERS; P TYPE CONDUCTIVITY; PREFERENTIAL ORIENTATION; RESPONSE/RECOVERY TIME;

TITANIUM DIOXIDE;

EID: 84923558972     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2014.12.010     Document Type: Article

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