Surface topography of superpolished silicon spheres

Conference Proceedings - 14th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2014

Volumn 2, Issue , 2014, Pages 99-102

  Meess R ^a   Felgner, A ^a   Hinzmann, G ^a   Luck A ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MANUFACTURE; NANOTECHNOLOGY; PRECISION ENGINEERING; SILICON; SPHERES;

MANUFACTURING PROCESS; MEASUREMENT PROCESS; PHYSIKALISCH-TECHNISCHE BUNDESANSTALT; PROCESS VARIATION; SPHERICAL SHAPE; ULTRA SMOOTH SURFACE;

SURFACE TOPOGRAPHY;

EID: 84923164335     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. Evans C, Paul E, Dornfeld D., Lucca DA, Byrne G, Tricard M, Klocke F., Dambon O and Mullany BA 2003 Material Removal Mechanisms in Lapping and Polishing Annals of the CIRP 52(2) 611-633
2. Leistner AJ et al. 1994 Fabrication and Sphericity Measurements of Single-Crystal Silicon Spheres Metrologia 31 231-243