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Volumn 119, Issue 5, 2015, Pages 2399-2411

Reaction of trimethylaluminum with water on Pt(111) and Pd(111) from 10-5 to 10-1 millibar

Author keywords

[No Author keywords available]

Indexed keywords

ACRYLIC MONOMERS; ALUMINA; ALUMINUM ALLOYS; ALUMINUM METALLOGRAPHY; ALUMINUM OXIDE; BINARY ALLOYS; CARBON; DENSITY FUNCTIONAL THEORY; PALLADIUM ALLOYS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84922344837     PISSN: 19327447     EISSN: 19327455     Source Type: Journal    
DOI: 10.1021/jp510032u     Document Type: Article
Times cited : (22)

References (57)
  • 1
    • 0000836443 scopus 로고    scopus 로고
    • Atomic Layer Deposition
    • Academic Press: San Diego, CA
    • Ritala, M. and Leskelä, M., Atomic Layer Deposition. In Handbook of Thin Film Materials; Academic Press: San Diego, CA, 2002; Vol. 1, pp 103-159.
    • (2002) Handbook of Thin Film Materials , vol.1 , pp. 103-159
    • Ritala, M.1    Leskelä, M.2
  • 2
    • 0242583886 scopus 로고    scopus 로고
    • Atomic Layer Deposition of Transition Metals
    • Lim, B. S.; Rahtu, A.; Gordon, R. G. Atomic Layer Deposition of Transition Metals Nat. Mater. 2003, 2, 749-754
    • (2003) Nat. Mater. , vol.2 , pp. 749-754
    • Lim, B.S.1    Rahtu, A.2    Gordon, R.G.3
  • 3
    • 21744444606 scopus 로고    scopus 로고
    • Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/Water Process
    • Puurunen, R. L. Surface Chemistry of Atomic Layer Deposition: A Case Study for the Trimethylaluminum/Water Process J. Appl. Phys. 2005, 97, 121301
    • (2005) J. Appl. Phys. , vol.97 , pp. 121301
    • Puurunen, R.L.1
  • 4
    • 75649140552 scopus 로고    scopus 로고
    • Atomic Layer Deposition: An Overview
    • George, S. M. Atomic Layer Deposition: An Overview Chem. Rev. 2009, 110, 111-131
    • (2009) Chem. Rev. , vol.110 , pp. 111-131
    • George, S.M.1
  • 5
    • 0002572435 scopus 로고
    • Atomic Layer Epitaxy
    • Suntola, T. Atomic Layer Epitaxy Thin Solid Films 1992, 216, 84-89
    • (1992) Thin Solid Films , vol.216 , pp. 84-89
    • Suntola, T.1
  • 7
    • 84863230246 scopus 로고    scopus 로고
    • Coking- and Sintering-Resistant Palladium Catalysts Achieved through Atomic Layer Deposition
    • Lu, J.; Fu, B.; Kung, M. C.; Xiao, G.; Elam, J. W.; Kung, H. H.; Stair, P. C. Coking- and Sintering-Resistant Palladium Catalysts Achieved through Atomic Layer Deposition Science 2012, 335, 1205-1208
    • (2012) Science , vol.335 , pp. 1205-1208
    • Lu, J.1    Fu, B.2    Kung, M.C.3    Xiao, G.4    Elam, J.W.5    Kung, H.H.6    Stair, P.C.7
  • 8
    • 0036093162 scopus 로고    scopus 로고
    • Preparation, Characterization and Activity Testing of Vanadia Catalysts Deposited onto Silica and Alumina Supports by Atomic Layer Deposition
    • Keränen, J.; Auroux, A.; Ek, S.; Niinistö, L. Preparation, Characterization and Activity Testing of Vanadia Catalysts Deposited onto Silica and Alumina Supports by Atomic Layer Deposition Appl. Catal., A 2002, 228, 213-225
    • (2002) Appl. Catal., A , vol.228 , pp. 213-225
    • Keränen, J.1    Auroux, A.2    Ek, S.3    Niinistö, L.4
  • 9
    • 77952525210 scopus 로고    scopus 로고
    • Palladium Catalysts Synthesized by Atomic Layer Deposition for Methanol Decomposition
    • Feng, H.; Elam, J. W.; Libera, J. A.; Setthapun, W.; Stair, P. C. Palladium Catalysts Synthesized by Atomic Layer Deposition for Methanol Decomposition Chem. Mater. 2010, 22, 3133-3142
    • (2010) Chem. Mater. , vol.22 , pp. 3133-3142
    • Feng, H.1    Elam, J.W.2    Libera, J.A.3    Setthapun, W.4    Stair, P.C.5
  • 10
    • 77955578755 scopus 로고    scopus 로고
    • Supported Ru-Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition
    • Christensen, S. T.; Feng, H.; Libera, J. L.; Guo, N.; Miller, J. T.; Stair, P. C.; Elam, J. W. Supported Ru-Pt Bimetallic Nanoparticle Catalysts Prepared by Atomic Layer Deposition Nano Lett. 2010, 10, 3047-3051
    • (2010) Nano Lett. , vol.10 , pp. 3047-3051
    • Christensen, S.T.1    Feng, H.2    Libera, J.L.3    Guo, N.4    Miller, J.T.5    Stair, P.C.6    Elam, J.W.7
  • 11
    • 68149083167 scopus 로고    scopus 로고
    • 2 Catalysts Prepared by Atomic Layer Deposition: UV-Visible Diffuse Reflectance, DRIFTS, and Visible Raman Spectroscopy Studies
    • 2 Catalysts Prepared by Atomic Layer Deposition: UV-Visible Diffuse Reflectance, DRIFTS, and Visible Raman Spectroscopy Studies J. Phys. Chem. C 2009, 113, 12412-12418
    • (2009) J. Phys. Chem. C , vol.113 , pp. 12412-12418
    • Lu, J.1    Kosuda, K.M.2    Van Duyne, R.P.3    Stair, P.C.4
  • 12
    • 84902198054 scopus 로고    scopus 로고
    • Toward Atomically-Precise Synthesis of Supported Bimetallic Nanoparticles Using Atomic Layer Deposition
    • Lu, J.; Low, K.-B.; Lei, Y.; Libera, J. A.; Nicholls, A.; Stair, P. C.; Elam, J. W. Toward Atomically-Precise Synthesis of Supported Bimetallic Nanoparticles Using Atomic Layer Deposition. Nat. Commun. 2014, 5.
    • (2014) Nat. Commun. , vol.5
    • Lu, J.1    Low, K.-B.2    Lei, Y.3    Libera, J.A.4    Nicholls, A.5    Stair, P.C.6    Elam, J.W.7
  • 13
    • 84859772484 scopus 로고    scopus 로고
    • Synthesis Strategy for Protected Metal Nanoparticles
    • Ray, N. A.; Van Duyne, R. P.; Stair, P. C. Synthesis Strategy for Protected Metal Nanoparticles J. Phys. Chem. C 2012, 116, 7748-7756
    • (2012) J. Phys. Chem. C , vol.116 , pp. 7748-7756
    • Ray, N.A.1    Van Duyne, R.P.2    Stair, P.C.3
  • 14
    • 84882675039 scopus 로고    scopus 로고
    • Synthesis and Stabilization of Supported Metal Catalysts by Atomic Layer Deposition
    • Lu, J.; Elam, J. W.; Stair, P. C. Synthesis and Stabilization of Supported Metal Catalysts by Atomic Layer Deposition Acc. Chem. Res. 2013, 46, 1806-1815
    • (2013) Acc. Chem. Res. , vol.46 , pp. 1806-1815
    • Lu, J.1    Elam, J.W.2    Stair, P.C.3
  • 15
    • 74049161716 scopus 로고    scopus 로고
    • Inverse Oxide/Metal Catalysts: A Versatile Approach for Activity Tests and Mechanistic Studies
    • Rodríguez, J. A.; Hrbek, J. Inverse Oxide/Metal Catalysts: A Versatile Approach for Activity Tests and Mechanistic Studies Surf. Sci. 2010, 604, 241-244
    • (2010) Surf. Sci. , vol.604 , pp. 241-244
    • Rodríguez, J.A.1    Hrbek, J.2
  • 16
    • 0037156103 scopus 로고    scopus 로고
    • Atomic Layer Deposition (ALD): From Precursors to Thin Film Structures
    • Leskelä, M.; Ritala, M. Atomic Layer Deposition (ALD): From Precursors to Thin Film Structures Thin Solid Films 2002, 409, 138-146
    • (2002) Thin Solid Films , vol.409 , pp. 138-146
    • Leskelä, M.1    Ritala, M.2
  • 17
    • 0001034130 scopus 로고
    • The Reaction Pathway for the Growth of Alumina on High Surface Area Alumina and in Ultrahigh Vacuum by a Reaction between Trimethyl Aluminum and Water
    • Soto, C.; Tysoe, W. The Reaction Pathway for the Growth of Alumina on High Surface Area Alumina and in Ultrahigh Vacuum by a Reaction between Trimethyl Aluminum and Water J. Vac. Sci. Technol., A 1991, 9, 2686-2695
    • (1991) J. Vac. Sci. Technol., A , vol.9 , pp. 2686-2695
    • Soto, C.1    Tysoe, W.2
  • 20
    • 0036685058 scopus 로고    scopus 로고
    • Viscous Flow Reactor with Quartz Crystal Microbalance for Thin Film Growth by Atomic Layer Deposition
    • Elam, J. W.; Groner, M. D.; George, S. M. Viscous Flow Reactor with Quartz Crystal Microbalance for Thin Film Growth by Atomic Layer Deposition Rev. Sci. Instrum. 2002, 73, 2981-2987
    • (2002) Rev. Sci. Instrum. , vol.73 , pp. 2981-2987
    • Elam, J.W.1    Groner, M.D.2    George, S.M.3
  • 22
    • 84862734520 scopus 로고    scopus 로고
    • In Situ ALD Experiments with Synchrotron Radiation Photoelectron Spectroscopy
    • Tallarida, M.; Schmeisser, D. In Situ ALD Experiments with Synchrotron Radiation Photoelectron Spectroscopy Semicond. Sci. Technol. 2012, 27, 074010
    • (2012) Semicond. Sci. Technol. , vol.27 , pp. 074010
    • Tallarida, M.1    Schmeisser, D.2
  • 23
    • 41849115189 scopus 로고    scopus 로고
    • Ambient Pressure Photoelectron Spectroscopy: A New Tool for Surface Science and Nanotechnology
    • Salmeron, M.; Schlögl, R. Ambient Pressure Photoelectron Spectroscopy: A New Tool for Surface Science and Nanotechnology Surf. Sci. Rep. 2008, 63, 169-199
    • (2008) Surf. Sci. Rep. , vol.63 , pp. 169-199
    • Salmeron, M.1    Schlögl, R.2
  • 25
    • 0042535721 scopus 로고
    • Basic Concepts of X-Ray Photoelectron Spectroscopy
    • Brundel, C. R. Baker, A. D. Academic Press: New York
    • Fadley, C. S. Basic Concepts of X-Ray Photoelectron Spectroscopy. In Electron Spectroscopy: Theory, Techniques and Applications; Brundel, C. R.; Baker, A. D., Eds.; Academic Press: New York, 1978; Vol. 2.
    • (1978) Electron Spectroscopy: Theory, Techniques and Applications , vol.2
    • Fadley, C.S.1
  • 27
    • 2442537377 scopus 로고    scopus 로고
    • Efficient Iterative Schemes for Ab Initio Total-Energy Calculations Using a Plane-Wave Basis Set
    • Kresse, G.; Furthmüller, J. Efficient Iterative Schemes for Ab Initio Total-Energy Calculations Using a Plane-Wave Basis Set Phys. Rev. B 1996, 54, 11169-11186
    • (1996) Phys. Rev. B , vol.54 , pp. 11169-11186
    • Kresse, G.1    Furthmüller, J.2
  • 28
    • 0030190741 scopus 로고    scopus 로고
    • Efficiency of Ab-Initio Total Energy Calculations for Metals and Semiconductors Using a Plane-Wave Basis Set
    • Kresse, G.; Furthmüller, J. Efficiency of Ab-Initio Total Energy Calculations for Metals and Semiconductors Using a Plane-Wave Basis Set Comput. Mater. Sci. 1996, 6, 15-50
    • (1996) Comput. Mater. Sci. , vol.6 , pp. 15-50
    • Kresse, G.1    Furthmüller, J.2
  • 29
    • 25744460922 scopus 로고
    • Projector Augmented-Wave Method
    • Blöchl, P. E. Projector Augmented-Wave Method Phys. Rev. B 1994, 50, 17953-17979
    • (1994) Phys. Rev. B , vol.50 , pp. 17953-17979
    • Blöchl, P.E.1
  • 30
    • 33645898818 scopus 로고
    • Accurate and Simple Analytic Representation of the Electron-Gas Correlation Energy
    • Perdew, J. P.; Wang, Y. Accurate and Simple Analytic Representation of the Electron-Gas Correlation Energy Phys. Rev. B 1992, 45, 13244-13249
    • (1992) Phys. Rev. B , vol.45 , pp. 13244-13249
    • Perdew, J.P.1    Wang, Y.2
  • 31
    • 1842816907 scopus 로고
    • Special Points for Brillouin-Zone Integrations
    • Monkhorst, H. J.; Pack, J. D. Special Points for Brillouin-Zone Integrations Phys. Rev. B 1976, 13, 5188-5192
    • (1976) Phys. Rev. B , vol.13 , pp. 5188-5192
    • Monkhorst, H.J.1    Pack, J.D.2
  • 33
    • 3242741763 scopus 로고
    • Atomic Subshell Photoionization Cross Sections and Asymmetry Parameters: 1< I> Z 103
    • Yeh, J.; Lindau, I. Atomic Subshell Photoionization Cross Sections and Asymmetry Parameters: 1 < I> Z 103 At. Data Nucl. Data Tables 1985, 32, 1-155
    • (1985) At. Data Nucl. Data Tables , vol.32 , pp. 1-155
    • Yeh, J.1    Lindau, I.2
  • 34
    • 0026371472 scopus 로고
    • Calculations of Electron Inelastic Mean Free Paths. 2. Data for 27 Elements over the 50-2000 eV Range
    • Tanuma, S.; Powell, C. J.; Penn, D. R. Calculations of Electron Inelastic Mean Free Paths. 2. Data for 27 Elements over the 50-2000 eV Range Surf. Interface Anal. 1991, 17, 911-926
    • (1991) Surf. Interface Anal. , vol.17 , pp. 911-926
    • Tanuma, S.1    Powell, C.J.2    Penn, D.R.3
  • 36
    • 2342655102 scopus 로고    scopus 로고
    • Vibrationally Resolved in Situ XPS Study of Activated Adsorption of Methane on Pt(111)
    • Fuhrmann, T.; Kinne, M.; Whelan, C. M.; Zhu, J. F.; Denecke, R.; Steinruck, H. P. Vibrationally Resolved in Situ XPS Study of Activated Adsorption of Methane on Pt(111) Chem. Phys. Lett. 2004, 390, 208-213
    • (2004) Chem. Phys. Lett. , vol.390 , pp. 208-213
    • Fuhrmann, T.1    Kinne, M.2    Whelan, C.M.3    Zhu, J.F.4    Denecke, R.5    Steinruck, H.P.6
  • 37
  • 38
    • 0034225399 scopus 로고    scopus 로고
    • Characterization of the Oxide/Hydroxide Surface of Aluminium Using X-Ray Photoelectron Spectroscopy: A Procedure for Curve Fitting the O 1s Core Level
    • Alexander, M. R.; Thompson, G. E.; Beamson, G. Characterization of the Oxide/Hydroxide Surface of Aluminium Using X-Ray Photoelectron Spectroscopy: A Procedure for Curve Fitting the O 1s Core Level Surf. Interface Anal. 2000, 29, 468-477
    • (2000) Surf. Interface Anal. , vol.29 , pp. 468-477
    • Alexander, M.R.1    Thompson, G.E.2    Beamson, G.3
  • 39
    • 0347536742 scopus 로고
    • Synchrotron Radiation Core Level Photoemission Investigation of the Initial-Stages of Oxidation of Al(111)
    • Mcconville, C. F.; Seymour, D. L.; Woodruff, D. P.; Bao, S. Synchrotron Radiation Core Level Photoemission Investigation of the Initial-Stages of Oxidation of Al(111) Surf. Sci. 1987, 188, 1-14
    • (1987) Surf. Sci. , vol.188 , pp. 1-14
    • McConville, C.F.1    Seymour, D.L.2    Woodruff, D.P.3    Bao, S.4
  • 40
    • 24944502221 scopus 로고    scopus 로고
    • A High-Resolution Photoemission Study of Nanoscale Aluminum Oxide Films on NiAl(110)
    • Mulligan, A.; Dhanak, V.; Kadodwala, M. A High-Resolution Photoemission Study of Nanoscale Aluminum Oxide Films on NiAl(110) Langmuir 2005, 21, 8312-8318
    • (2005) Langmuir , vol.21 , pp. 8312-8318
    • Mulligan, A.1    Dhanak, V.2    Kadodwala, M.3
  • 42
    • 0002180164 scopus 로고    scopus 로고
    • Introduction to Studies of Aluminum and Its Compounds by XPS
    • Sherwood, P. M. A. Introduction to Studies of Aluminum and Its Compounds by XPS Surf. Sci. Spectra 1998, 5, 1-3
    • (1998) Surf. Sci. Spectra , vol.5 , pp. 1-3
    • Sherwood, P.M.A.1
  • 43
    • 33644969398 scopus 로고    scopus 로고
    • XPS Study of the Major Minerals in Bauxite: Gibbsite, Bayerite and (Pseudo-)Boehmite
    • Kloprogge, J. T.; Duong, L. V.; Wood, B. J.; Frost, R. L. XPS Study of the Major Minerals in Bauxite: Gibbsite, Bayerite and (Pseudo-)Boehmite J. Colloid Interface Sci. 2006, 296, 572-576
    • (2006) J. Colloid Interface Sci. , vol.296 , pp. 572-576
    • Kloprogge, J.T.1    Duong, L.V.2    Wood, B.J.3    Frost, R.L.4
  • 44
    • 0015567956 scopus 로고
    • X-Ray Photoelectron Spectra of Aluminum Oxides - Structural Effects on Chemical-Shift
    • Lindsay, J. R.; Rose, H. J.; Swartz, W. E.; Watts, P. H.; Rayburn, K. A. X-Ray Photoelectron Spectra of Aluminum Oxides-Structural Effects on Chemical-Shift Appl. Spectrosc. 1973, 27, 1-5
    • (1973) Appl. Spectrosc. , vol.27 , pp. 1-5
    • Lindsay, J.R.1    Rose, H.J.2    Swartz, W.E.3    Watts, P.H.4    Rayburn, K.A.5
  • 48
    • 4444235648 scopus 로고    scopus 로고
    • Methanol Dehydrogenation and Formation of Carbonaceous Overlayers on Pd(111) Studied by High-Pressure SFG and XPS Spectroscopy
    • Morkel, M.; Kaichev, V. V.; Rupprechter, G.; Freund, H. J.; Prosvirin, I. P.; Bukhtiyarov, V. I. Methanol Dehydrogenation and Formation of Carbonaceous Overlayers on Pd(111) Studied by High-Pressure SFG and XPS Spectroscopy J. Phys. Chem. B 2004, 108, 12955-12961
    • (2004) J. Phys. Chem. B , vol.108 , pp. 12955-12961
    • Morkel, M.1    Kaichev, V.V.2    Rupprechter, G.3    Freund, H.J.4    Prosvirin, I.P.5    Bukhtiyarov, V.I.6
  • 49
    • 84862183485 scopus 로고    scopus 로고
    • Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition
    • Lu, J.; Liu, B.; Greeley, J. P.; Feng, Z.; Libera, J. A.; Lei, Y.; Bedzyk, M. J.; Stair, P. C.; Elam, J. W. Porous Alumina Protective Coatings on Palladium Nanoparticles by Self-Poisoned Atomic Layer Deposition Chem. Mater. 2012, 24, 2047-2055
    • (2012) Chem. Mater. , vol.24 , pp. 2047-2055
    • Lu, J.1    Liu, B.2    Greeley, J.P.3    Feng, Z.4    Libera, J.A.5    Lei, Y.6    Bedzyk, M.J.7    Stair, P.C.8    Elam, J.W.9
  • 51
    • 0035796933 scopus 로고    scopus 로고
    • TPD and XPS Study of the CO Adsorption on Transition-SP Metal Systems: Pd and Al
    • Johánek, V.; Tsud, N.; Matolín, V.; Stará, I. TPD and XPS Study of the CO Adsorption on Transition-SP Metal Systems: Pd and Al Vacuum 2001, 63, 15-22
    • (2001) Vacuum , vol.63 , pp. 15-22
    • Johánek, V.1    Tsud, N.2    Matolín, V.3    Stará, I.4
  • 52
    • 0036608963 scopus 로고    scopus 로고
    • Role of Pd-Al Bimetallic Interaction in CO Adsorption and Catalytic Properties of Bulk PdAl Alloy: XPS, ISS, TDS, and SIMS Study
    • Johanek, V.; Stara, I.; Matolín, V. Role of Pd-Al Bimetallic Interaction in CO Adsorption and Catalytic Properties of Bulk PdAl Alloy: XPS, ISS, TDS, and SIMS Study Surf. Sci. 2002, 507, 92-98
    • (2002) Surf. Sci. , vol.507 , pp. 92-98
    • Johanek, V.1    Stara, I.2    Matolín, V.3
  • 54
    • 0031559990 scopus 로고    scopus 로고
    • Growth Morphology and Electronic Properties of Ultrathin Al Films on Pt (111)
    • Wilson, K.; Brake, J.; Lee, A. F.; Lambert, R. M. Growth Morphology and Electronic Properties of Ultrathin Al Films on Pt (111) Surf. Sci. 1997, 387, 257-268
    • (1997) Surf. Sci. , vol.387 , pp. 257-268
    • Wilson, K.1    Brake, J.2    Lee, A.F.3    Lambert, R.M.4
  • 55
    • 0012691092 scopus 로고
    • Surface Core-Level Shifts for Pt Single-Crystal Surfaces
    • Baetzold, R. C.; Apai, G.; Shustorovich, E.; Jaeger, R. Surface Core-Level Shifts for Pt Single-Crystal Surfaces Phys. Rev. B 1982, 26, 4022-4027
    • (1982) Phys. Rev. B , vol.26 , pp. 4022-4027
    • Baetzold, R.C.1    Apai, G.2    Shustorovich, E.3    Jaeger, R.4


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