메뉴 건너뛰기




Volumn 21, Issue 2, 2015, Pages 331-339

Improving voltage output with PZT beam array for MEMS-based vibration energy harvester: theory and experiment

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC RECTIFIERS; ENERGY HARVESTING; FABRICATION; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC ACTUATORS;

EID: 84921700568     PISSN: 09467076     EISSN: 14321858     Source Type: Journal    
DOI: 10.1007/s00542-013-2052-0     Document Type: Article
Times cited : (29)

References (29)
  • 1
    • 34249296681 scopus 로고    scopus 로고
    • A review of power harvesting using piezoelectric materials (2003c2006)
    • Anton SR, Sodano HA (2007) A review of power harvesting using piezoelectric materials (2003c2006). Smart Mater Struct 16(3):R1
    • (2007) Smart Mater Struct , vol.16 , Issue.3 , pp. R1
    • Anton, S.R.1    Sodano, H.A.2
  • 2
    • 33846077160 scopus 로고    scopus 로고
    • Energy harvesting vibration sources for microsystems applications
    • Beeby SP, Tudor MJ, White NM (2006) Energy harvesting vibration sources for microsystems applications. Meas Sci Technol 17(12):R175
    • (2006) Meas Sci Technol , vol.17 , Issue.12 , pp. R175
    • Beeby, S.P.1    Tudor, M.J.2    White, N.M.3
  • 4
    • 84870056977 scopus 로고    scopus 로고
    • Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a cmos compatible process
    • Defosseux M, Allain M, Defay E, Basrour S (2012) Highly efficient piezoelectric micro harvester for low level of acceleration fabricated with a cmos compatible process. Sens Actuators A: Phys 188:489–494
    • (2012) Sens Actuators A: Phys , vol.188 , pp. 489-494
    • Defosseux, M.1    Allain, M.2    Defay, E.3    Basrour, S.4
  • 8
    • 84891584678 scopus 로고    scopus 로고
    • Piezoelectric energy harvesting, Wiley, NY:
    • Erturk A, Inman DJ (2011) Piezoelectric energy harvesting. Wiley, NY
    • (2011) Inman DJ
    • Erturk, A.1
  • 10
    • 34447275424 scopus 로고    scopus 로고
    • Indoor solar energy harvesting for sensor network router nodes
    • Hande A, Polk T, Walker W, Bhatia D (2007) Indoor solar energy harvesting for sensor network router nodes. Microprocess Microsyst 31(6):420–432
    • (2007) Microprocess Microsyst , vol.31 , Issue.6 , pp. 420-432
    • Hande, A.1    Polk, T.2    Walker, W.3    Bhatia, D.4
  • 15
    • 84863230318 scopus 로고    scopus 로고
    • Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers
    • Liu H, Lee C, Kobayashi T, Tay CJ, Quan C (2012) Investigation of a MEMS piezoelectric energy harvester system with a frequency-widened-bandwidth mechanism introduced by mechanical stoppers. Smart Mater Struct 21(3):035,005
    • (2012) Smart Mater Struct , vol.21 , Issue.3 , pp. 035,005
    • Liu, H.1    Lee, C.2    Kobayashi, T.3    Tay, C.J.4    Quan, C.5
  • 16
    • 70349696211 scopus 로고    scopus 로고
    • Piezoelectric thin films for sensors, actuators, and energy harvesting
    • Muralt P, Polcawich RG, Trolier-McKinstry S (2009) Piezoelectric thin films for sensors, actuators, and energy harvesting. MRS Bull 34(09):658–664
    • (2009) MRS Bull , vol.34 , Issue.9 , pp. 658-664
    • Muralt, P.1    Polcawich, R.G.2    Trolier-McKinstry, S.3
  • 17
    • 84873583650 scopus 로고    scopus 로고
    • Micro-fabricated lead zirconate titanate bent cantilever energy harvester with multi-dimensional operation
    • Park JC, Khym S, Park JY (2013) Micro-fabricated lead zirconate titanate bent cantilever energy harvester with multi-dimensional operation. Appl Phys Lett 102(4):043901
    • (2013) Appl Phys Lett , vol.102 , Issue.4 , pp. 043901
    • Park, J.C.1    Khym, S.2    Park, J.Y.3
  • 18
    • 84892351742 scopus 로고    scopus 로고
    • Mechatronics: dynamics of electromechanical and piezoelectric systems. Kluwer Academic Publishers
    • Dordrecht, Netherlands:
    • Preumont A (2006) Mechatronics: dynamics of electromechanical and piezoelectric systems. Kluwer Academic Publishers, Springer, Dordrecht, Netherlands
    • (2006) Springer
    • Preumont, A.1
  • 19
    • 80051698105 scopus 로고    scopus 로고
    • A review of vibration-based MEMS piezoelectric energy harvesters
    • Saadon S, Sidek O (2011) A review of vibration-based MEMS piezoelectric energy harvesters. Energy Convers Manag 52(1):500–504
    • (2011) Energy Convers Manag , vol.52 , Issue.1 , pp. 500-504
    • Saadon, S.1    Sidek, O.2
  • 20
    • 42549138834 scopus 로고    scopus 로고
    • The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated si proof mass for vibration energy harvesting
    • Shen D, Park JH, Ajitsaria J, Choe SY, Wikle III, HC, Kim DJ (2008) The design, fabrication and evaluation of a MEMS PZT cantilever with an integrated si proof mass for vibration energy harvesting. J Micromech Microeng 18(5):055017
    • (2008) J Micromech Microeng , vol.18 , Issue.5 , pp. 055017
    • Shen, D.1    Park, J.H.2    Ajitsaria, J.3    Choe, S.Y.4    Wikle, H.C.5    Kim, D.J.6
  • 21
    • 68849103726 scopus 로고    scopus 로고
    • Micromachined PZT cantilever based on soi structure for low frequency vibration energy harvesting
    • Shen D, Park JH, Noh JH, Choe SY, Kim SH, Wikle III, HC, Kim DJ (2009) Micromachined PZT cantilever based on soi structure for low frequency vibration energy harvesting. Sens Actuators A: Phys 154(1):103–108
    • (2009) Sens Actuators A: Phys , vol.154 , Issue.1 , pp. 103-108
    • Shen, D.1    Park, J.H.2    Noh, J.H.3    Choe, S.Y.4    Kim, S.H.5    Wikle, H.C.6    Kim, D.J.7
  • 22
    • 27144453812 scopus 로고    scopus 로고
    • Comparison of piezoelectric energy harvesting devices for recharging batteries
    • Sodano HA, Inman DJ, Park G (2005) Comparison of piezoelectric energy harvesting devices for recharging batteries. J Intell Mater Syst Struct 16(10):799–807
    • (2005) J Intell Mater Syst Struct , vol.16 , Issue.10 , pp. 799-807
    • Sodano, H.A.1    Inman, D.J.2    Park, G.3
  • 23
    • 79551630550 scopus 로고    scopus 로고
    • Recent progress in MEMS electret generator for energy harvesting
    • Suzuki Y (2011) Recent progress in MEMS electret generator for energy harvesting. IEEE J Trans Electr Electron Eng 6(2):101–111
    • (2011) IEEE J Trans Electr Electron Eng , vol.6 , Issue.2 , pp. 101-111
    • Suzuki, Y.1
  • 24
  • 25
    • 34548394538 scopus 로고    scopus 로고
    • Thermal energy harvesting device using ferromagnetic materials
    • Ujihara M, Carman GP, Lee DG (2007) Thermal energy harvesting device using ferromagnetic materials. Appl Phys Lett 91(9):093508
    • (2007) Appl Phys Lett 91(9) , vol.93508
    • Ujihara, M.1    Carman, G.P.2    Lee, D.G.3
  • 26
    • 84905584371 scopus 로고    scopus 로고
    • Piezoelectric MEMS power generators for vibration energy harvesting
    • InTech:
    • Wu WJ, Lee BS (2012) Piezoelectric MEMS power generators for vibration energy harvesting. In: Lallart M (ed) Small-scale energy harvesting. InTech, pp 156–157
    • (2012) Lallart M , pp. 156-157
    • Wu, W.J.1    Lee, B.S.2    harvesting, S.-S.3
  • 27
    • 84890913014 scopus 로고    scopus 로고
    • Piezoelectric vibration energy harvesting by optimized synchronous electric charge extraction
    • Wu Y, Badel A, Formosa F, Liu W, Agbossou AE (2012) Piezoelectric vibration energy harvesting by optimized synchronous electric charge extraction. J Intell Mater Syst Struct 24(12):1445–1458
    • (2012) J Intell Mater Syst Struct , vol.24 , Issue.12 , pp. 1445-1458
    • Wu, Y.1    Badel, A.2    Formosa, F.3    Liu, W.4    Agbossou, A.E.5
  • 28
    • 80053057979 scopus 로고    scopus 로고
    • Fabrication of low-residual-stress aln thin films and their application to microgenerators for vibration energy harvesting
    • Zhang J, Cao Z, Kuwano H (2011) Fabrication of low-residual-stress aln thin films and their application to microgenerators for vibration energy harvesting. Jpn J Appl Phys 50(9):09ND18
    • (2011) Jpn J Appl Phys , vol.50 , Issue.9 , pp. 09ND18
    • Zhang, J.1    Cao, Z.2    Kuwano, H.3
  • 29
    • 78649421872 scopus 로고    scopus 로고
    • A vibration-based electromagnetic energy harvester using mechanical frequency up-conversion method
    • Zorlu O, Topal ET, Kulah H (2011) A vibration-based electromagnetic energy harvester using mechanical frequency up-conversion method. Sens J IEEE 11(2):481–488
    • (2011) Sens J IEEE , vol.11 , Issue.2 , pp. 481-488
    • Zorlu, O.1    Topal, E.T.2    Kulah, H.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.