Network analyzer calibration for cryogenic on-wafer measurements

43rd ARFTG Conference Digest - Spring 1994

Volumn , Issue , 1994, Pages 24-33

  Hietala, Vincent M ^a   Housel, Mark S ^a   Caldwell, Robert B ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYOGENICS; LOW TEMPERATURE EFFECTS; PROBES; TEMPERATURE;

CRYOGENIC ON-WAFER MEASUREMENTS; LOW TEMPERATURE ENVIRONMENT; LOW-TEMPERATURE APPLICATIONS; NETWORK ANALYZER CALIBRATION; NETWORK ANALYZER MEASUREMENT; ON WAFER MICROWAVE MEASUREMENTS; SANDIA NATIONAL LABORATORIES; TEMPERATURE RANGE;

CALIBRATION;

EID: 84921280353     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ARFTG.1994.327055     Document Type: Conference Paper

References (9)

1. J. Laskar and J. Kolodzey, "Cryogenic vacuum high frequency probe station", J. Vac. Sci. Technol. B 8(5), pp. 1161-1165, Sep/Oct. 1990.
2. c Superconductors at Cryogenic Temperatures Down to 20 K", IEEE Trans. Microwave Theory Tech., vol. 40, no. 12, pp. 2325-2331, Dec. 1992.
3. T. Mizutani, and K. Maezawa, "Temperature Dependence of High-Frequency Performance of AlGaAs/InGaAs Pseudomorphic HEMT's", IEEE Electron Device Lett., vol. 13, no. 1, pp. 8-10, Jan. 1992.
4. S. Maranowski, J. Laskar, M. Feng, and J. Kolodzey, "Cryogenic Microwave Performance of 0.5-μm InGaAs MESFET's", IEEE Electron Device Lett., vol. 13, no. 1, pp. 64-66, January 1992.
5. R. B. Marks, "A Multiline Method of Network Analyzer Calibration", IEEE Trans. Microwave Theory Tech., vol. 39, no. 7, pp. 1205-1215, July 1991.
6. D. F. Williams, R. B. Marks, and A. Davidson, "Comparison of On-Wafer Calibrations", 38th ARFTG Conference Digest, December, 1991.
7. A. Davidson, K. Jones, and E. Strid, "LRM and LRRM Calibrations with Automatic Determination of Load Inductance", 36th ARFTG Conference Digest, November, 1990.
8. J. E. Pence, "Verification of LRM Calibrations with Load Inductance Compensation for CPW Measurements on GaAs Substrates", 42th ARFTG Conference Digest, November, 1993.
9. J. C. Zolper, M. E. Sherwin, A. G. Baca, R. J. Shul, A. J. Howard, D. J. Rieger, J. F. Klem, and V. M. Hietala, "A Self-Aligned Zn-Gate JFET by Ion Implantation", Proceedings of 1993 International Semiconductor Device Research Symposium, pp. 295-298, Dec. 1-3, 1993.