Low thermal budget 6 nm furnace N2O-nitrided gate oxides

European Solid-State Device Research Conference

Volumn , Issue , 1995, Pages 239-242

  Paulzen, G M ^a   Hutten, E K H ^b   Meyssen, V M H ^a  

^a PHILIPS RESEARCH LABORATORIES   (Netherlands)

^b UNIVERSITY OF TWENTE   (Netherlands)

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EID: 84920725806     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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