Thermal conductivity of thin silicon dioxide films in integrated circuits

European Solid-State Device Research Conference

Volumn , Issue , 1995, Pages 473-476

  Kleiner, Michael B ^a,b   Kuhn, Stefan A ^a,b   Weber, Werner ^a  

^a SIEMENS AG   (Germany)

^b TECHNICAL UNIVERSITY OF MUNICH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON DIOXIDE FILM;

EID: 84920722825     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)