Vertical MOS transistors with 70nm channel length

European Solid-State Device Research Conference

Volumn , Issue , 1995, Pages 101-104

  Risch, L ^a   Krautschneider, W H ^a   Hofmann, F ^a   Schafer H ^a  

^a SIEMENS AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL LENGTH;

EID: 84920718209     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)