P-Type copper aluminum oxide thin films for gas-sensing applications

Sensors and Actuators, B: Chemical

Volumn 209, Issue , 2015, Pages 287-296

  Baratto, C ^a,b   Kumar, R ^a,b   Faglia, G ^a,b   Vojisavljevic K ^c   Malic B ^c  

^a ISTITUTO NAZIONALE DI OTTICA   (Italy)

^b UNIVERSITY OF BRESCIA   (Italy)

^c JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Chemical gas sensor; Copper aluminum oxide; Delafossite; Spinel; Sputtering

Indexed keywords

ACETONE; ALUMINUM; CHEMICAL DETECTION; CHEMICAL SENSORS; COPPER; DEPOSITION; GAS DETECTORS; GAS SENSING ELECTRODES; GASES; MAGNETRON SPUTTERING; OXIDE FILMS; OXIDES; OZONE; OZONE RESISTANCE; SINTERING; SPUTTERING; THIN FILMS;

CHEMICAL GAS SENSORS; CHEMIRESISTIVE SENSORS; COPPER ALUMINUM OXIDES; DELAFOSSITES; GAS SENSING APPLICATIONS; POST DEPOSITION ANNEALING; RF-MAGNETRON SPUTTERING; SPINEL;

ALUMINUM COATINGS;

EID: 84918559731     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.11.116     Document Type: Article

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