Hydrogen-related memory traps in thin silicon nitride films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 1, Issue 2, 1983, Pages 600-603

  Stein, Herman J ^a   Kapoor, Vikram J ^b   Bailey, Robert S ^b  

^a SANDIA NATIONAL LABORATORIES   (United States)

^b CASE WESTERN RESERVE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84915289884     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.571966     Document Type: Article

References (20)

1. W. D. Brown, Solid State Technol. 22, 77 (1979).
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3. C. T. Kirk, Jr., J. Appl. Phys. 50, 4190 (1979).
4. V. J. Kapoor, R. S. Bailey, and S. R. Smith, J. Vac. Sci. Technol. 18, 305 (1981).
5. R. S. Bailey and V. J. Kapoor, J. Vac. Sci. Technol. 20, 484 (1982).
6. H. J. Stein and V. J. Kapoor, The Electrochemical Society Extended Abstracts, Denver, Colorado, October 11–16, 1981, Abstract 405, p. 405.
7. S. Fujita, W. L. Hoi, M. Nishihara, and A. Sasaki, IOP Conference Series No, 59 (Institute of Physics, London, 1980), p. 551.
8. H. J. Stein, S. T. Picraux, and P. H. Holloway, IEEE Trans. Electron Devices ED-25, 1008 (1978);
9. P. S. Peercy, H. J. Stein, B. L. Doyle, and S. T. Picraux, J. Electron. Mater. 8, 11 (1979). These papers contain other relevant references.
10. H. J. Stein, Appl. Phys. Lett. 32, 379 (1978).
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12. V. J. Kapoor and R. A. Turi, J. Appl. Phys. 52, 311 (1981).
13. N. J. Harrick, Internal Reflection Spectroscopy (Interscience, New York, 1967).
14. H. Dunn, P. Pan, F. R. White, and R. W. Douse, J. Electrochem. Soc. 128, 1555(1981).
15. V. J. Kapoor and J. P. Delatore, J. Appl. Phys. 53, 5079 (1982).
16. H. J. Stein, P. S. Peercy, and D. S. Ginley, in The Physics of MOS Insulators, edited by G. Lukovsky, S. T. Pantelides, and F. L. Galeener (Pergemon, New York, 1980), p. 147.
17. Yukun Hsia and K. L. Ngai, in Proceedings of the Eleventh Conference on Solid State Devices, Tokyo, 1979
18. Jpn. J. Appl. Phys. 19 (1980)
19. Suppl. 19–1, p. 245.
20. J. Robertson, Philos. Mag. B44, 215 (1981).