In situ chemical analysis in thin film production using soft x-ray emission spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 9, Issue 3, 1991, Pages 638-645

  Georgson, M ^a   Bray, G ^a   Claesson, Y ^a   Nordgrea, J ^a   Ribbing, C G ^a   Wassdah, N ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84914768599     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.577379     Document Type: Article

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