Nucleation of body-centered-cubic tantalum films with a thin niobium underlayer

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 5, Issue 6, 1987, Pages 3408-3411

  Face, D W ^a   Prober, D E ^a  

^a YALE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84912959156     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.574203     Document Type: Article

References (22)

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