2D spatial frequency considerations in comparing 1D power spectral density measurements

Optics InfoBase Conference Papers

Volumn , Issue , 2010, Pages

  Takacs, Peter Z ^a   Barber, Sam ^b   Church, Eugene L ^a   Kaznatcheev, Konstantine ^a   McKinney, Wayne R ^b   Yashchuk, Valeriy Y ^b  

^a BROOKHAVEN NATIONAL LABORATORY   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

POWER SPECTRAL DENSITY; SURFACE ROUGHNESS;

ORTHOGONAL DIRECTIONS; PROFILING INSTRUMENT; ROUGHNESS SPECTRUM; SPATIAL FREQUENCY;

SPECTRAL DENSITY;

EID: 84912092593     PISSN: None     EISSN: 21622701     Source Type: Conference Proceeding    
DOI: 10.1364/oft.2010.owe5     Document Type: Conference Paper

References (5)

1. Church, E.L. and Berry, H.C., Spectral analysis of the finish of polished optical surfaces, Wear 83, p. 189-201 (1982).
2. Bhushan, B., Wyant, J.C., and Koliopoulos, C.L., Measurement of surface topography of magnetic tapes by Mirau interferometry, Applied Optics 24, p. 1489-1497 (1985).
3. Church, E.L. and Takacs, P.Z., Chapter 8 - Surface Scattering, in Handbook of Optics - 3rd edition, M. Bass, Editor. McGraw-Hill. (2010)
4. Church, E.L., The precision measurement and characterization of surface finish in "Precision Surface Metrology", Proc. SPIE 429, pp. 86-95, (1983)
5. Takacs, P.Z., Furenlid, K., DeBiasse, R., and Church, E.L., "Surface topography measurements over the 1 meter to 10 micrometer spatial period bandwidth", in Surface Characterization and Testing II, Proc. SPIE 1164, eds. J.E. Grievenkamp and M. Young, pp. 203-211, (1989).