Mechanical modeling and geometric error analysis of rotatable h type stage using flexure hinge mechanism

Proceedings of the 10th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2010

Volumn 1, Issue , 2010, Pages 316-319

  Kim, Kyongchon ^a   Gweon, D G ^a   Jung, J ^b   Kim, J W ^c   Shin, S K ^c  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^b Korea University   (South Korea)

^c Soonhan Engineering   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ERRORS; GEOMETRY; HINGES; LINEAR TRANSFORMATIONS; PRECISION ENGINEERING;

FLEXURE HINGE; GEOMETRIC ERRORS; HOMOGENEOUS TRANSFORMATION MATRIX; MECHANICAL MODEL; PRECISION STAGE;

MATHEMATICAL TRANSFORMATIONS;

EID: 84911423067     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. "Design of a dual servo XYtheta stage using double H frame", K.H.Kim. ASPE. 2002.
2. " Principles and techniques of vibrations", Leonard Meirovitch, 1996, Prentice hall, 88-92 pp.
3. "Geometric error correction in coordinatre measurement", Gyula Hermann, Acta Polytechnica Hungarica, 2007, Vol. 4 No. 1