Z calibration of the LNE ultra precision coordinate measuring machine

Proceedings of the 7th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2007

Volumn 2, Issue , 2007, Pages 93-96

  Lahousse, L ^a   Leleu, S ^b   David, J ^b   Gibaru, O ^b   Ducourtieux, S ^a  

^a LABORATOIRE NATIONAL DE MÉTROLOGIE ET D ESSAIS LNE   (France)

^b ARTS ET MÉTIERS PARISTECH   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CALIBRATION; COORDINATE MEASURING MACHINES; UNCERTAINTY ANALYSIS;

GEOMETRIC CALIBRATIONS; MEASURING RANGES; NANOMETER UNCERTAINTY; THREE-DIMENSIONAL OBJECT; ULTRA PRECISION; VERTICAL DISPLACEMENTS;

PRECISION ENGINEERING;

EID: 84908198669     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (2)

1. LI96] Li CJ, Li S, Yu J. " High-resolution error separation technique for in-situ straightness measurement of machine tools and workpieces." Mechatronics1996;6(3):337-347
2. GAO02] Gao W, Yokoya ma J, Hidetoshi K, Satoshi K. " Precision measurement of cylinder straightness using a scanning multi-probe system." Precision Eng. 2002; 26 :279-288