One-step alignment of bulk micro components

Proceedings of the 9th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2009

Volumn 2, Issue , 2009, Pages 393-396

  Brecher, C ^a   Weinzierl, M ^a  

^a FRAUNHOFER INSTITUTE FOR PRODUCTION TECHNOLOGY IPT   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO-COMPONENTS;

EID: 84908155494     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. Brecher, C. ; Weinzierl, M. ; Lange, S. ; Peschke, C. : Active and Passive Tool Alignment in Ultraprecision Machining for the Manufacturing of Highly Precise Structures. In: Production Engineering -Research and Development 8 (2006), 1, ISSN 0944-6524, Pg. 193-196
2. Dittrich, H. ; Heckele, M. ; Schomburg, W. K. : Werkzeugentwicklung für das Heibprägen beidseitig mikrostrukturierter Formteile. Dissertation. Forschungszentrum Karlsruhe 2004, ISSN 0947-8620
3. Brecher, C. ; Weinzierl, M. ; Lange, S. : Development of Passive Alignment Techniques for the Assembly of Hybrid Microsystems. In: Precision Assembly Technologies for Mini and Micro Products. Springer, New York, USA 2006, ISBN 0-387-31276-5, Pg. . 611-615