Device reliability and repeatability of a high performance Si/SiGe HBT BiCMOS technology

European Solid-State Device Research Conference

Volumn , Issue , 1998, Pages 452-455

  Ahlgren, D C ^a   Hueckel, G ^a   Freeman, G ^a   Walter, K ^a   Groves, R ^a   Ting, T H ^a   Vayshenker, A ^a   Hostetter, E ^a  

^a IBM MICROELECTRONICS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CMOS INTEGRATED CIRCUITS; STATISTICAL PROCESS CONTROL;

ANALOG TECHNOLOGY; CMOS TECHNOLOGY; DEVICE RELIABILITY; PASSIVE ELEMENTS; SI/SIGE; TECHNOLOGY DESIGNS;

BICMOS TECHNOLOGY;

EID: 84908155127     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (4)

1. D. Ahlgren et al., IEDM Tech. Dig., p 859, 1996.
2. D. Ahlgren et al., BCTM Tech. Dig., p 195, 1997.
3. D. Harame, BCTM Tech. Dig., p 36, 1997.
4. V. Kane, 1. Qual. Tech., 18, p 41, 1986.