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Volumn 2, Issue , 2007, Pages 113-116
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A new apparatus for cylindricity measurement with uncertainty less than 25 nm
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Author keywords
[No Author keywords available]
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Indexed keywords
DEFECTS;
ELECTRODES;
PRECISION ENGINEERING;
CROSS CAPACITANCES;
CYLINDRICITY;
CYLINDRICITY MEASUREMENT;
KLITZING CONSTANTS;
ONE PARTS;
UNCERTAINTY ANALYSIS;
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EID: 84908152917
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (5)
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References (3)
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