Investigation of stress in STI using UV-raman spectroscopy

European Solid-State Device Research Conference

Volumn 13-15 Sept. 1999, Issue , 1999, Pages 196-198

  Dombrowski, K F ^a   Dietrich, B ^a   De Wolf, I ^b   Rooyackers, R ^b   Badenes, G ^b  

^a IHP   (Germany)

^b IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

RAMAN SPECTROSCOPY; STRESSES;

HIGH STRESS; LOCAL AREAS; MECHANICAL STRESS; SHALLOW TRENCH ISOLATION; UV-RAMAN SPECTROSCOPY;

SEMICONDUCTING SILICON;

EID: 84907885003     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)