High performance submicron SILO process for high density EPROM memories using rapid thermal nitridation of silicon

European Solid-State Device Research Conference

Volumn , Issue , 1989, Pages 151-154

  Deleonibus, S ^a   Molle, P ^a   Lajzerowicz, J ^a   Guillaumot, B ^b   Laporte, P ^a   Bergemont, A ^b  

^a CEA LETI   (France)

^b SGS THOMSON ^*  (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84907818740     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-642-52314-4_30     Document Type: Conference Paper

References (0)