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Volumn , Issue , 1989, Pages 950-953
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A novel approach for an electrical vernier to measure mask misalignment
a a a a |
Author keywords
[No Author keywords available]
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Indexed keywords
ALIGNMENT;
EQUIPMENT TESTING;
SHIFT REGISTERS;
SOLID STATE DEVICES;
INTERCONNECT SCHEMES;
TEST EQUIPMENTS;
ELECTRIC VARIABLES MEASUREMENT;
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EID: 84907813426
PISSN: 19308876
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1007/978-3-642-52314-4_198 Document Type: Conference Paper |
Times cited : (7)
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References (0)
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