A novel sensor for the direct measurement of process induced residual stress in interconnects

European Solid-State Device Research Conference

Volumn , Issue , 2003, Pages 115-118

  Horsfall, A B ^a   Dos Santos, J M M ^a   Soare, S M ^a   Wright, N G ^a   O'Neill, A G ^a   Bull, S J ^a   Walton, A J ^b   Gundlach, A M ^b   Stevenson, J T M ^b  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

^b UNIVERSITY OF EDINBURGH   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DIRECT MEASUREMENT;

EID: 84907702152     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.2003.1256824     Document Type: Conference Paper

References (8)

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