Using RSM techniques to contour plot response distributions of semiconductor processes

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 829-832

  Walton, A J ^a   Fallon, M ^a   Newsam, M I ^a   Ferguson, R S ^b   Sprevak, D ^b  

^a UNIVERSITY OF EDINBURGH   (United Kingdom)

^b QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

CONTOUR PLOT; RESPONSE DISTRIBUTION; SEMICONDUCTOR PROCESS;

EID: 84907700515     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)