IMEMS-Integrated micro electro mechanical systems by VLSI and micromachining

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 273-280

  Baltes, H ^a   Brand, O ^a   Korvink, J G ^a   Lenggenhager, R ^a   Paul, O ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

MICRO ELECTRO MECHANICAL SYSTEM;

EID: 84907696340     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)