Interfacial oxide break-up in npn polysilicon emitter bipolar transistors by fluorine implantation

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 55-58

  Moiseiwitsch, N E ^a   Ashburn, P ^a  

^a UNIVERSITY OF SOUTHAMPTON   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FLUORINE IMPLANTATION; INTERFACIAL OXIDES; POLYSILICON EMITTER BIPOLAR TRANSISTORS;

EID: 84907689932     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)