Study of local silicon oxidation with calibrated nitride model

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 259-262

  Ferreira, P ^a   Senez, V ^a   Collard, D ^a   Baccus, B ^a  

^a Institut Superieur de l'Electronique et du Numerique   (France)

Author keywords

[No Author keywords available]

Indexed keywords

SILICON OXIDATION;

EID: 84907685613     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)