Dynamic behavior of arsenic clusters in silicon

European Solid-State Device Research Conference

Volumn , Issue , 1994, Pages 93-96

  Bauer, H ^a   Pichler, P ^a   Ryssel, H ^a,b  

^a FRAUNHOFER INSTITUTE FOR INTEGRATED SYSTEMS AND DEVICE TECHNOLOGY IISB   (Germany)

^b UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DYNAMIC BEHAVIORS;

EID: 84907681307     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (0)