Comparison of an L-array and a single transistor method to extract Leff and Rs in deep submicron MOSFETs

European Solid-State Device Research Conference

Volumn , Issue , 1997, Pages 660-663

  Biesemans, S ^a   De Meyer, K ^a  

^a IMEC   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

DEEP SUB-MICRON; EXTRACTION METHOD; MOSFETS; SINGLE TRANSISTORS; STATISTICAL CONCEPTS;

TRANSISTORS;

EID: 84907558099     PISSN: 19308876     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ESSDERC.1997.194515     Document Type: Conference Paper

References (4)

1. K. Ng., J. Brews, IEEE Circuits &Devices, p.33-38, Nov. 1990
2. G. Hu, C. Chang, Y. Chia, IEEE Trans. on Electron Devices, vol. 34, no.12, p.2469-2475, 1987
3. Y. Taur, et al. IEEE Electron Device Letters, vol. 13, no.5, p. 267-269, 1992
4. S. Biesemans, M. Hendriks, S. Kubicek, K. de Meyer, VLSI Symp. on Technology, p.165, 1996