Formation of C-N thin films by ion beam deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 13, Issue 4, 1995, Pages 2110-2122

  Zuhr, R A ^b   Marton, D ^a   Todorov, S S ^a   Al Bayati, A H ^a   Rabalais, J W ^a  

^a UNIVERSITY OF HOUSTON   (United States)

^b OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84907009269     PISSN: 07342101     EISSN: 15208559     Source Type: Journal    
DOI: 10.1116/1.579528     Document Type: Article

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