Synergetic effect of organic cores and inorganic shells for core/shell structured composite abrasives for chemical mechanical planarization

Applied Surface Science

Volumn 314, Issue , 2014, Pages 180-187

  Chen, Yang ^a   Li, Zhina ^a   Miao, Naiming ^a  

^a CHANGZHOU UNIVERSITY   (China)

Author keywords

Chemical mechanical planarization; Composite abrasive; Core shell structure; Synergistic effect

Indexed keywords

ATOMIC FORCE MICROSCOPY; CERIUM OXIDE; CHEMICAL MECHANICAL POLISHING; INDIUM COMPOUNDS; SILICA; SURFACE ROUGHNESS;

COMPOSITE ABRASIVES; CORE/SHELL STRUCTURE; MATERIAL REMOVAL RATE; MECHANICAL DAMAGES; ORGANIC/INORGANIC COMPOSITES; SYNERGETIC EFFECT; SYNERGISTIC EFFECT; TOPOGRAPHICAL VARIATIONS;

ABRASIVES;

EID: 84906700968     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2014.06.166     Document Type: Article

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