Molecular layer deposition of organic-inorganic hybrid films using diethylzinc and trihydroxybenzene

Journal of Nanoscience and Nanotechnology

Volumn 14, Issue 8, 2014, Pages 6137-6142

  Han, Kyu S ^a   Sung, Myung M ^a  

^a Hanyang University   (South Korea)

Author keywords

Atomic layer deposition; Molecular layer deposition; Organic inorganic hybrid films

Indexed keywords

DEPOSITION; SURFACE REACTIONS; THIN FILMS; ZINC OXIDE;

FIELD-EFFECT MOBILITIES; HYBRID THIN FILM; HYDROXYBENZENE; MOLECULAR LAYER DEPOSITION; NANO-LAMINATED FILMS; ORGANIC-INORGANIC HYBRID; ORGANIC-INORGANIC HYBRID FILMS; TRIHYDROXYBENZENE;

ATOMIC LAYER DEPOSITION;

EID: 84906536454     PISSN: 15334880     EISSN: 15334899     Source Type: Journal    
DOI: 10.1166/jnn.2014.8448     Document Type: Article

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