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Volumn , Issue , 2012, Pages 251-258

A new concept for high-speed atline and inline CT for up to 100% mass production process control allowing both 3D metrology and failure analysis

Author keywords

3D metrology; 3D ADR; Atline CT; Automated defect recognition; Fast CT; Gantry based CT; Helix CT; Inline CT

Indexed keywords

COMPUTERIZED TOMOGRAPHY; DEFECTS; UNITS OF MEASUREMENT;

EID: 84906250344     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper
Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.