Atomic-layer deposition of cadmium chalcogenides on silicon

Russian Journal of Physical Chemistry A

Volumn 88, Issue 9, 2014, Pages 1580-1584

  Ezhovskii, Yu K ^a  

^a PETER THE GREAT ST PETERSBURG POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

atomic layer deposition; cadmium chalcogenides; nanostructures

Indexed keywords

ATOMS; CADMIUM; CHALCOGENIDES; NANOSTRUCTURES; SILICON;

CADMIUM CHALCOGENIDES; CADMIUM SELENIDES; LAYER GROWTH; SILICON SURFACES; ULTRAFINE;

DEPOSITION;

EID: 84906223043     PISSN: 00360244     EISSN: None     Source Type: Journal    
DOI: 10.1134/S0036024414090143     Document Type: Article

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