Molecular layer deposition

ECS Transactions

Volumn 58, Issue 10, 2013, Pages 263-275

  Cameron, D C ^a   Ivanova, T V ^a  

^a LAPPEENRANTA UNIVERSITY OF TECHNOLOGY   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITION;

FILM MATERIALS; MOLECULAR LAYER DEPOSITION; MOLECULAR LAYER DEPOSITIONS (MLD); ORGANIC PRECURSOR; ORGANIC THIN FILMS; PROCESS DEVELOPMENT;

ATOMIC LAYER DEPOSITION;

EID: 84904898434     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/05810.0263ecst     Document Type: Conference Paper

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