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Volumn 1, Issue , 2005, Pages 672-674
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Novel material patterning for electronic and magnetic components on PDMS
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Author keywords
Chemical deposition; Electronic components; Magnetic cell trap; Plasma patterning
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Indexed keywords
CHEMICAL ANALYSIS;
ELASTOMERS;
ELECTROSTATIC ACTUATORS;
NICKEL ALLOYS;
SILICONES;
THERMOCOUPLES;
CHEMICAL DEPOSITION;
ELECTRONIC COMPONENT;
FEATURE SIZES;
MAGNETIC CELLS;
MAGNETIC COMPONENTS;
NOVEL MATERIALS;
RESISTIVE HEATERS;
SILICONE RUBBER;
MAGNETOPLASMA;
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EID: 84902460685
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (4)
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References (3)
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