ZnO nanowires strips growth: Template reliability and morphology study

Microelectronic Engineering

Volumn 121, Issue , 2014, Pages 147-152

  Pea, M ^a   Maiolo, L ^b   Pilloton, R ^a   Rinaldi, A ^c,d   Araneo, R ^e   Giovine, E ^a   Orsini, A ^f   Notargiacomo, A ^a  

^a IFN CNR   (Italy)

^b CNR   (Italy)

^c University of l'Aquila International Research Center for Mathematics and Mechanics of Complex System (MEMOCS)   (Italy)

^d ENEA   (Italy)

^e SAPIENZA UNIVERSITY OF ROME   (Italy)

^f UNIVERSITY OF ROME TOR VERGATA   (Italy)

Author keywords

Electron beam lithography; Hydrothermal growth; Nanowires; Resist adhesion; Zinc oxide

Indexed keywords

ADHESION; COPOLYMERS; ELECTRON BEAM LITHOGRAPHY; ESTERS; MORPHOLOGY; PHOTORESISTS; ZINC OXIDE;

EFFECTS OF MATERIALS; ELECTRON RESIST; HYDROTHERMAL GROWTH; PATTERNED FILMS; PHOTORESIST LAYERS; TEMPLATE SIZES; ZNO NANOSTRUCTURES; ZNO NANOWIRES;

NANOWIRES;

EID: 84901436027     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2014.04.045     Document Type: Article

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