Multiphysics modeling of thin piezoelectric transducers integrated in flexible substrates

ULIS 2014 - 2014 15th International Conference on Ultimate Integration on Silicon

Volumn , Issue , 2014, Pages 77-80

  Ardila, G ^a   Tao, R ^a   Montes L ^a   Mouis, M ^a  

^a IMEP LAHC   (France)

Author keywords

flexible devices; mechanical energy harvesting; nanowires; piezoelectricity; transducer

Indexed keywords

CRYSTALLOGRAPHY; ENERGY HARVESTING; LOW POWER ELECTRONICS; NANOWIRES; SILICON; TRANSDUCERS;

FLEXIBLE DEVICE; INTEGRATED SYSTEMS; MECHANICAL ENERGIES; MULTI-PHYSICS MODELING; PIEZOELECTRIC LAYERS; PIEZOELECTRIC NANOSTRUCTURES; PROCESSING TECHNOLOGIES; TRANSDUCTION EFFICIENCY;

PIEZOELECTRICITY;

EID: 84901331330     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULIS.2014.6813910     Document Type: Conference Paper

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