The influence of annealing on the electrical stability of Parylene C structures

Biomedizinische Technik

Volumn 57, Issue SI-1 TRACK-S, 2012, Pages 855-

  von Metzen, Rene P ^a   Stieglitz, Thomas ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

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EID: 84899760757     PISSN: 00135585     EISSN: None     Source Type: Journal    
DOI: 10.1515/bmt-2012-4272     Document Type: Article

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