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UVX 2012 - 11e Colloque sur les Sources Coherentes et Incoherentes UV, VUV et X: Applications et Developpements Recents

Volumn , Issue , 2013, Pages

Fabrication of microcraters on silicon substrate by UV nanosecond photonic nanojets from microspheres

(7) Deepak, K L N a Grojo, D a Charmasson, L a Delaporte, P a Uteza O a Dussauze, M b Fargin, E c

a AIX MARSEILLE UNIVERSITY (France)

b INSTITUT DES SCIENCES MOLÉCULAIRES (France)

c INST CHIM MATIERE COND BORDEAUX (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; MICROSPHERES; SILICON; SILICON OXIDES; SUBSTRATES;

DAMAGE THRESHOLD; FDTD SIMULATIONS; LANGMUIR BLODGETT TECHNIQUES; MULTI-SHOT IRRADIATION; NANOSECOND LASER PULSE; NUMBER OF SHOTS; PHOTONIC NANOJETS; SILICON SUBSTRATES;

LANGMUIR BLODGETT FILMS;

EID: 84899510647 PISSN: None EISSN: None Source Type: Conference Proceeding
DOI: 10.1051/uvx/201302003 Document Type: Conference Paper

Times cited : (4)

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