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Volumn , Issue , 2006, Pages 673-680

RF and microwave rapid magnetic induction heating of silicon wafers

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EID: 84898446118     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-32944-2_73     Document Type: Conference Paper
Times cited : (6)

References (6)
  • 6
    • 0000652854 scopus 로고    scopus 로고
    • RF and Microwave Rapid Magnetic Induction Heating of Silicon Wafers
    • J. H. Booske, R. F. Cooper, S. A. Freeman, K. Rybakov, and V. Semenov, Phys Plasmas 5, 1664-1670 (1998). RF and Microwave Rapid Magnetic Induction Heating of Silicon Wafers
    • (1998) Phys Plasmas , vol.5 , pp. 1664-1670
    • Booske, J.H.1    Cooper, R.F.2    Freeman, S.A.3    Rybakov, K.4    Semenov, V.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.