How the coupling of microwave and RF energy in materials can affect solid state charge and mass transport and result in unique processing effects

Advances in Microwave and Radio Frequency Processing - Report from the 8th International Conference on Microwave and High Frequency Heating

Volumn , Issue , 2006, Pages 461-471

  Booske, John H ^a   Cooper, Reid F ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; ELECTROMAGNETIC FIELDS; INTEGRATED CIRCUIT MANUFACTURE; MICROWAVES; SURFACE REACTIONS; TEMPERATURE CONTROL;

CONVENTIONAL FURNACE; CONVENTIONAL HEATING; CONVENTIONAL PROCESSING; ENDOTHERMIC REACTIONS; INTERNAL TEMPERATURE; INVERTED TEMPERATURE PROFILES; MATERIAL'S SURFACE; PROCESSING EFFECTS;

MICROWAVE MATERIALS PROCESSING;

EID: 84898424259     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-32944-2_49     Document Type: Conference Paper

References (20)

1. B. Meng, B. Klein, J. Booske, and R. Cooper, Phys. Rev.B 53 [19], 12,777-12,785 (1996
2. B. Meng, Ph.D. Thesis, Electrical Engineering, University of Wisconsin-Madison, 1995.
3. K. Thompson, J. Booske, Y. Gianchandani, and R. Cooper, this Conference.
4. D.J. Skamser, J.J. Thomas, H.M. Jennings, and D.L. Johnson, J. Mater. Res., Vol. 10, 3160-3178 (1995
5. D.J. Skamser and D.L. Johnson, MRS Symp. Proc. Vol. 347, 325-330 (1994
6. J.G.P. Binner and I.A.H. Al-Dawery, Superconductor Science and Technology, Vol. 11, 449-457 (1998
7. R. Plarre, S.L. Halverson, W.E. Burkholder, T.S. Bigelow, M.E. Misenheimer, J.H. Booske, and E.V. Nordheim, Proceedings of ANPP-4th International Conference on Pests in Agriculture, Montpellier 6-8 January, 1997.
8. N.K. Budraa, H.W. Jackson, M. Barmatz, W.T. Pike, and J. Mai, Proceedings of the 7th International (AMPERE) Conference on Microwave and High Frequency Heating, 463-466 (1999
9. see for example, D.L. Johnson, J. Amer Ceram. Soc. Vo. 74, 849-850 (1991
10. R. Borchert, M. Willert-Porada, Ceram. Trans., Vol. 80, 491-498 (1997
11. K. Thompson, J.H. Booske, R.F. Cooper, Y.B. Gianchandani, and S. Ge, Ceram. Trans. Vol. 111, 391-398 (2001
12. M. Willert-Porada, Ceram. Trans., Vol. 80, 153-163 (1997)
13. S. Vodegel, Ph.D. Thesis, University Dortmund (1993
14. W. Lerch, B. Bayha, D.F.Downey, E.A. Arevalo; Proceedings of the 199th Annual Mtg, Electrochemical Society, Symposium on Rapid Thermal Processing, (Washington, DC, March 2001
15. G. Whittaker and L. Cronin, Proceedings of the 2nd International AMPERE Conference on Microwave Chemistry (Antibes, 2001), pp. 291-294.
16. J.H. Booske, R.F. Cooper, S.A. Freeman, K. Rybakov, and V. Semenov, Phys Plasmas 5, 1664-1670 (1998
17. S.A. Freeman, J.H. Booske, and R.F. Cooper, Phys. Rev. Lett. 74, 2042-2045 (1995
18. K.I. Rybakov and V.E. Semenov, Phys. Rev. B, Vol. 49, 64 (1994
19. V.E. Semenov, K.I. Rybakov, S.A. Freeman, J.H. Booske, and R.F. Cooper, Phys. Rev. B, 55, 3559-3567 (1997
20. S.A. Freeman, J.H. Booske, and R.F. Cooper, J. Appl. Phys. , 83, 5761-5772 (1998).