Micromachined gas sensors based on tungsten oxide nanoneedles directly integrated via aerosol assisted CVD

Sensors and Actuators, B: Chemical

Volumn 198, Issue , 2014, Pages 210-218

  Stoycheva, T ^a,d   Annanouch, F E ^a   Gracia I ^b   Llobet, E ^a   Blackman, C ^c   Correig, X ^a   Vallejos, S ^a,b,c  

^a UNIVERSITAT ROVIRA I VIRGILI   (Spain)

^b UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^c UNIVERSITY COLLEGE LONDON   (United Kingdom)

^d LABORATORIO MDM   (Italy)

Author keywords

Gas sensor; Microsensor; Nanoneedles; Nanoparticles; Tungsten oxide

Indexed keywords

AEROSOL-ASSISTED CHEMICAL VAPOUR DEPOSITIONS; ELECTRODE GEOMETRIES; MICRO SYSTEMS TECHNOLOGIES; MICROMACHINED GAS SENSOR; OXIDIZING AGENTS; POLYCRYSTALLINE FILM; SENSING PROPERTY; TUNGSTEN OXIDE;

AEROSOLS; CHEMICAL SENSORS; CHEMICAL VAPOR DEPOSITION; GAS DETECTORS; MICROSENSORS; NANOPARTICLES; OXIDES; TUNGSTEN COMPOUNDS;

NANONEEDLES;

EID: 84898063486     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2014.03.040     Document Type: Article

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